Entegris wins patent rulings in Taiwan and China over CMP slurry
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Entegris Achieves Further Success in Defending Its CMP Slurry Patent Portfolio
August 18, 2026 7:00 AM EDTBILLERICA, Mass.--(BUSINESS WIRE)-- Entegris, Inc. (Nasdaq: ENTG), a leading supplier of critical advanced materials and process solutions for the semiconductor and other high-technology industries, today announced recent decisions in Taiwan and China upholding patents covering key Entegris colloidal silica slurry technology used in chemical mechanical planarization (CMP) applications. The decisions further reinforce the strength of Entegriss global intellectual property portfolio and underscore the Companys technology leadership in advanced CMP slurries for semiconductor manufacturing.
On July 14, 2026, the Taiwan Intellectual Property and Commercial Court rejected a challenge by an affiliate of Qnity... More
