Axcelis Announces Sponsorship and Participation in the 25th International Conference on Ion Implantation and Annealing Technology 2026

BEVERLY, Mass., Sept. 14, 2026 /PRNewswire/ -- Axcelis Technologies, Inc. (NASDAQ: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, will be a Platinum Sponsor at the International Conference on Ion Implantation and Annealing Technology 2026 (IIT 2026) taking place September 20-24 at the Congress Center Villach in Austria. IIT 2026 is the 25th Conference in the biennial series focused on the major challenges in current and emerging technologies related to implant/doping and annealing processes, device applications, equipment, metrology and modeling. 

At the event, Axcelis will host a company exhibit in Booth #7 and the company's technologists and collaborators will present on the following topics:

Implant Innovation

• Purion XEmax™ for SiC Superjunction MOSFETs
• Purion H6™ Next Generation High Current Implanter
• Improving SiC MOSFET Within-Wafer Implant Uniformity Through an Integrated CIP
• Remote Vaporizer for Al Implantation in SiC

Enabling SiC Manufacturing Excellence

• Impact of Stacking Density on SiC Implant Profiles
• High-Energy Al Channeling Implant Characterization
• Aluminum Ion Implantation Beam Current & Performance Improvement

Implant Platform Developments

• Realtime Beam Shape Monitor
• Beam Energy Measurement System
• Wafer Backside Particle Reduction
• Low-Cost High Current Metal Ion Source

Emerging Research

• Contact Module Engineering for Advanced CMOS Nodes
• Resonator Devices
• Neutron Spectroscopy of Light Ion Nuclear Reactions

President and CEO of Axcelis Technologies Russell Low said, "We're proud to be a Platinum Sponsor of IIT 2026. As a world leader in ion implantation innovation, Axcelis is committed to helping customers succeed with enabling technologies and support solutions that deliver the purity, precision and productivity needed for the next generation of semiconductor devices."

For more information on the event, or to register, visit the conference website at https://www.iitvillach2026.com/  

About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry nearly 50 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:

Investor Relations Contact:
David Ryzhik
Senior Vice President and Interim CFO
Telephone: (978) 787-2352
Email: [email protected]

Press/Media Relations Contacts: 
Maureen Hart
Senior Director, Corporate & Marketing Communications
Telephone: (978) 787-4266
Email: [email protected]

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SOURCE Axcelis Technologies, Inc.