Gigaphoton Develops Gas Recycling System for ArF Excimer Lasers

Achieves a 50% Neon Gas Recycling Rate and Contributes to a Stable Supply Through Gas Reduction Technologies

OYAMA, Tochigi, Japan--(BUSINESS WIRE)-- Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Tatsuo Enami), a manufacturer of lightsources for semiconductor lithography, announced that it developed hTGM for ArF, the on-site neon gas recycling system for ArF excimer lasers.

ArF lithography plays a critical role in the mass production of advanced semiconductors. Stable laser operation and the effective use of rare gas resources are key challenges for semiconductor manufacturers.
In recent years, the supply-demand balance of neon gas has become increasingly volatile due to geopolitical risks and global supply chain disruptions. Gigaphoton has supported customers in maintaining stable production through gas reduction technologies and gas recycling systems for KrF excimer lasers. The newly announced hTGM for ArF extends these efforts to the field of ArF lithography.

hTGM for ArF collects and recycles used gas within semiconductor fabs. A single hTGM for ArF unit is capable of reducing gas consumption by up to 470 kiloliters per year and can be connected to up to five ArF lasers. In addition, its hardware commonality with hTGM for KrF facilitates efficient production ramp.

Tatsuo Enami, President and CEO of Gigaphoton, said, “By combining technologies that reduce gas consumption in excimer lasers with on-site gas recycling systems, Gigaphoton aims to mitigate risks associated with the procurement of rare gases, support customers’ stable operations, and strengthen the supply chain resilience of the semiconductor industry. Gigaphoton will continue to contribute to the development of the global semiconductor industry through advanced laser technologies and environmentally conscious solutions.”

About GIGAPHOTON

Established in 2000, GIGAPHOTON is a leading provider of KrF and ArF excimer laser lightsources for semiconductor lithography. GIGAPHOTON enables semiconductor manufacturers worldwide to achieve higher productivity, superior quality, and more sustainable manufacturing through its advanced laser technologies. Its global service network delivers customer-focused support, dedicated to maximizing availability and stable production operations for semiconductor manufacturers around the world.

Leveraging its expertise in laser and lithography technologies, GIGAPHOTON is expanding its capabilities beyond semiconductor lithography into new fields, including EUV lightsources, excimer lasers for advanced packaging and advanced material processing applications..

For more information, please visit https://www.gigaphoton.com

View source version on businesswire.com: https://www.businesswire.com/news/home/20260929911995/en/

Media Contact:
GIGAPHOTON Inc. Corporate Planning Department
Email: [email protected]

Source: Gigaphoton Inc.

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